Cleanroom material handling systems

IHI

IHI-Corporation

Cleanroom material handling systems

IHI will respond to clean environment needs with our advanced technology.
With our progressive approach to element/system development in the production systems and transportation area, IHI constantly offers innovative solutions.

Glass substrate transportation systems

IHI ensures suitable handling for glass substrates for FPD (flat panel displays), which are increasingly growing in size.

  • IHI offers one-stop service extending from equipment development to whole factory layouts, enabling us to respond to the growing demand for handling larger substrates.
  • IHI meets increasingly diverse customer needs, such as throughput improvement and footprint minimization.
Random access buffer

Random access buffer

Eighth generation stacker crane for glass substrates

Eighth generation stacker crane for glass substrates

Dustless AGVs

Dustless AGVs

Pneumatic floating conveyor

Pneumatic floating conveyor

Semi-conductor/wafer transportation system

Semi-conductor/wafer transportation system Realized sheet/noncontact handling

  • IHI offers a full line of storage/transportation systems designed for semi-conductor and wafer production lines
  • IHI offers cutting edge production lines whose key hardware includes next-generation storage/transportation equipment
Non-wire guided AGV
Non-wire guided AGV
Non-wire guided AGV
Non-wire guided AGV