Engineering

Slurry

Slurry Recycling System for Semiconductors, Solar cells, and Others

We have developed a system for reducing waste and recycling materials, such as silicon, abrasive grains, coolants, and water, in the semiconductor-related silicon wafer manufacturing processes. With a proven track record and the trust we have built, we have expanded into recycling systems for solar cell wafers and quartz single-crystal chips, and we have been enjoying high acclaim in this area. Our approach involves the reutilization of materials that are used in abondance and full process automation from slurry feeding to discharging, resulting in reduced operational costs.

Features

  • Separation of abrasive grains and chips by two phase separation (patent holder)
  • Significant reduction in operational costs
  • Reduction in labor costs through fully automatic operation
  • Recovery possible in slurry form! Saves energy and does not require chemicals because it is recovered in powder form!
  • fully automatic operation of slurry supply and discharge with wire saws. *Optional
 

Structure and Operating Principle

  • Skid-mounted design using our centrifuge

Primary Applications

  • Recovery of valuable materials from semiconductor silicon wafer processing
  • Recovery of valuable materials from solar cell silicon wafer processing
  • Recovery of valuable materials from crystal silicon wafer processing

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